The global semiconductor dry vacuum pump market is expected to expand, growing from approximately $1.5168 billion in 2025 to approximately $3.03479 billion in 2032, with a CAGR of approximately 10.14% from 2026 to 2032.
Semiconductor dry vacuum pumps are used for exhaust in processes such as CVD, PVD, lithography and etching, and are expected to see demand as equipment that maintains a vacuum environment without using oil. Market revenue is projected to increase from approximately $1.5168 billion in 2025 to approximately $3.03479 billion in 2032, with a CAGR of 10.14% forecast for 2026–2032.
The US market is expected to grow from $173.83 million in 2025 to $332.31 million in 2032, with a CAGR of 9.31%. The Asian market, comprising China, Taiwan, South Korea and Japan, is expected to expand from $1,212.24 million in 2025 to $2,457.57 million in 2032, with a CAGR of 10.36%. The European market is forecast to grow from $90.10 million in 2025 to $167.82 million in 2032, with a CAGR of 8.99%.
Product types include Roots, screw, scroll, claw and other pumps, while applications include CVD, PVD, lithography, etching and other processes. Because each process requires different designs and material selections, product configurations tailored to each region and application are considered important.