Nikon has achieved a resolution of 0.85μm for its flat-panel display exposure equipment and has begun accepting orders. The equipment's performance is attracting market attention.
Following Nikon's achievement of a resolution of 0.85μm for its flat-panel display exposure equipment, the company began accepting orders for the equipment.
The equipment is an exposure system used in the flat-panel display manufacturing process and is reported to deliver a resolution of 0.85μm.