Development of microbubble cleaning equipment and high-performance chemical filters
First written in FY2018. 4 of 6 entries say "Advanced", first in FY2019. Latest entry: FY2026.
2 other companies' latest entry also says "Advanced".
- FY2026AdvancedAnnual report
「This technology delivers cleaning performance equal to or better than conventional cleaning methods that use chemicals, while significantly reducing environmental impact by reducing the use of pure water and chemicals. We are advancing development in cooperation with customers by verifying its effectiveness on actual items to be cleaned.」
In addition to joint research with universities on microbubble cleaning technology, we are working with customers to verify its effectiveness on actual items to be cleaned. - FY2024RestatedAnnual report
「In addition to conducting detailed analytical evaluations using university equipment, the Company has progressed to evaluation tests using a prototype.」
The Company continues analytical evaluations using university equipment and evaluation tests using a prototype for the microbubble cleaning equipment. - FY2023AdvancedAnnual report
「In addition to conducting detailed analytical evaluations using university equipment, the Company has progressed to evaluation tests using a prototype.」
Development of the microbubble cleaning equipment progressed from analytical evaluations using university equipment to evaluation tests using a prototype. - FY2020AdvancedAnnual report
「To develop applications for microbubble generation technology beyond the semiconductor and electronics industries, the Company began joint research with a university on sterilisation technology using ozone nanobubble water.」
As an application of microbubble technology, the Company began joint research with a university on sterilisation technology using ozone nanobubble water. - FY2019AdvancedAnnual report
「For cleaning equipment used at semiconductor plants, the Company has begun joint research with a university on equipment using microbubble cleaning technology, which enhances cleaning performance with fine bubbles and reduces the amount of cleaning chemicals used. Development includes assessing basic physical properties and conducting detailed analytical evaluations using the university’s equipment.」
The Company began joint research with a university on microbubble cleaning equipment and progressed to assessing basic physical properties and conducting analytical evaluations. - FY2018First statedAnnual report
「For cleaning equipment used at semiconductor plants, the Company is developing equipment that uses microbubble cleaning technology, which enhances cleaning performance with fine bubbles and reduces the amount of cleaning chemicals used. For chemical filters for semiconductor plant cleanrooms, it is developing filters with higher performance and longer service lives.」
The Company newly disclosed the development of microbubble cleaning equipment for semiconductors to reduce chemical consumption and chemical filters designed for higher performance and longer service life.