According to the Global Automated Spectroscopic Ellipsometry Report, the market was worth approximately $149 million in 2025 and is expected to grow to approximately $156 million in 2026 and $245 million by 2032, with annual growth of approximately 7.8% forecast.
The global automated spectroscopic ellipsometry market is expected to grow from approximately $149 million in 2025 to approximately $156 million in 2026 and $245 million by 2032, with a CAGR of approximately 7.8% from 2026 to 2032. This growth is attributed not only to the cycle of capital investment, but also to semiconductor miniaturization and increasing layer complexity, as well as the growing number of measurement points in manufacturing processes.
Automated spectroscopic ellipsometry can analyze material properties, including refractive index, film thickness and surface quality, with high precision. Because it is better suited than single-wavelength systems to capturing wavelength dependence, it is suitable for evaluating multilayer films, semiconductors, solar cells and optical coatings.
The market remains highly concentrated, with the top five companies accounting for approximately 77% of the market as of 2025. Major companies include KLA, J.A. Woollam, Semilab, SENTECH, Eoptics, HORIBA, Bruker, Otsuka Electronics, Ellitop and Park Systems.
The Asia-Pacific region, including ASEAN, is expected to maintain its advantage, while demand for measurement applications beyond semiconductors, including solar cells, displays and medical thin films, is expected to expand. Product developments by major companies are expected to drive the market in 2025, including Semilab's system equipped with a new head, an integrated system from SENTECH and PVA TePla, and the launch of new equipment by KLA.