FIG announced automated material-handling equipment for semiconductor plants. It developed WILL-MoMa, a mobile manipulator combining the autonomous transport robot WILL-FA with a robotic arm, with the aim of automating material handling, maintaining cleanliness and improving equipment operating efficiency during unmanned hours.
FIG group company REALIZE announced that it had developed WILL-MoMa, a mobile manipulator for semiconductor manufacturers. The product combines the company's proprietary autonomous transport robot WILL-FA with a robotic arm and is intended to meet demand for automating material handling processes at semiconductor plants.
WILL-MoMa integrates WILL-FA's automated transport functions with the robotic arm's work functions and incorporates proprietary control technology. Automating transport between pieces of equipment is expected to reduce the burden on workers, maintain cleanliness and improve equipment utilization during unmanned hours, such as at night.
The announcement represents an effort to promote automation at semiconductor manufacturing sites and respond to cleanroom requirements. Further updates on expanded deployment and demonstration results are expected to draw attention.