NIKON CORPORATION has been selected for an NEDO subsidy project and will begin developing a digital exposure system with 0.5µm resolution for post-5G applications. Through the development of large-area, high-resolution exposure technology, it aims to decarbonise the digital society and strengthen the manufacturing base.
NIKON CORPORATION, a major Japanese camera and optical-equipment manufacturer, has been selected for NEDO's “Post-5G Information and Communications Systems Infrastructure Strengthening R&D Project / Development of Advanced Semiconductor Manufacturing Technology (Subsidy).” The selection means that it will newly begin developing a digital exposure system capable of achieving 0.5µm (L/S) resolution.
The project aims to develop core technologies for information and communications systems in the post-5G era while achieving both a digital society and decarbonisation. In response to the theme “Development of Large-Area, High-Resolution Exposure Systems,” NIKON CORPORATION proposed “Development of Digital Exposure Systems for High-Resolution Advanced Packaging” and was selected.